With the increasing complexity of semiconductor advanced process technology and the continuous growth of 300mm wafer fabrication investment, the market demand for semiconductor silicon carbide (SiC) parts is steadily expanding. According to market research reports, the global semiconductor silicon carbide parts market size is about 1.349 billion US dollars in 2025, and it is expected to approach 2.563 billion US dollars by 2032, with a compound annual growth rate of 8.8%.

Silicon carbide parts refer to high-purity silicon carbide, CVD silicon carbide, silicon carbide coated graphite, sintered silicon carbide and other material systems as the basis, through chemical vapor deposition, precision machining, ultra-clean cleaning and other processes manufacturing, used in semiconductor manufacturing equipment in the key structural parts, load-bearing parts, cavity functional parts and consumable parts. The main product types cover focus ring, edge ring, gas shower head, wafer bearing base, furnace tube crystal boat, cavity lining, etc. The core function is to improve the high temperature resistance, corrosion resistance, plasma resistance initializing ability in the equipment cavity, and reduce the risk of particle and metal contamination.

From the perspective of application scenarios, silicon carbide components mainly serve key process equipment such as etching, thin film deposition, diffusion, annealing, epitaxy, MOCVD, etc. According to SEMI, the global 300mm wafer factory equipment expenditure will reach $133 billion in 2026, an increase of 18% year-on-year, and further reach $151 billion in 2027, an increase of 14% year-on-year, which will provide strong support for the demand for key components of frontline equipment.

From the perspective of the competition landscape, the global market is still dominated by Japanese, American, and European companies. Japanese companies have accumulated deep accumulation in the fields of CVD silicon carbide, silicon carbide coatings, and fine ceramics. Chinese silicon carbide parts companies have accelerated the verification and expansion process in the fields of domestic equipment matching, wafer plant second supply import, and some CVD silicon carbide parts. With the national "14th Five-Year Plan" listing key materials for integrated circuits as a research and development priority, and the localization of regional supply chains, the domestic replacement of silicon carbide parts ushered in a strategic opportunity period.